AC 1500 DSPL / DMP / CMP

Double-sided Polishing Machine

With it's patented UPAC system, the Peter Wolters AC 1500 is ideally suited to throughput-optimzed processing of 6" and 8" SiC wafers. In combination with the epicyclic workholder system, highest wafer qualities are achieved.

Sensor technology for repeatable process results
Wafers with excellent flatness, parallelism, surface quality and surface roughness (TTV AVG ≤ 1 µm)

SiC Wafer Processing 4", 6" and 8" Wafer

Brand: Peter Wolters

AC 1500 Doppelseiten-Poliermaschine von Lapmaster Wolters

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Characteristics AC 1500 DSPL / DMP / CMP Polishing Machine

Unique and patented UPAC (Upper Platen Adaptive Control) System
Monitoring of the cooling lubricant flow rate
Loop control

First-Class customer support for the highest machine availability and productivity
High-Pressure Conditioner
Slurry Recycling Station
Slurry Pressure Distribution

Integrated Process Data Recording (DataCare®)
Industry 4.0
Touch Screen

We think ahead because full service starts with the product.

We ensure security. As a full-service provider, we offer everything you need to guarantee that your processes run like clockwork.

Consumables

Customized full-service offers for maximum production reliability.

Service