AC 2000 P4
Prime Wafer Double-sided Polishing Machine
The AC 2000 P4 sets market-leading standards in polishing of silicon prime wafers. With ist innovational and technological advance the AC 2000 P4 combines highest throughput with optimized Cost of Ownership.
- Adaption of polishing gap for actively controlled working conditions enables highest quality results.
- Industry leading standards in precision, quality, efficiency and Cost of Ownership.
Wafer up to 300 mm / 12'', 15 Wafer / Batch
Brand: Peter Wolters
Characteristics AC 2000 P4 Polishing Machine
- Unique and patented UPAC (Upper Platen Adaptive Control) System
- Unique LPAC (Lower Platen Adaptive Control) System (patent pending)
- Monitoring of the cooling lubricant flow rate
- Loop control
- First-Class customer support for the highest machine availability and productivity
- Integrated high precision interferometric device for in-situ measurement of the wafer thickness
- High-Pressure Conditioner
- Slurry Recycling Station
- Slurry Pressure Distribution
- Integrated Process Data Recording (DataCare®)
- Industry 4.0
- Touch Screen
We think ahead because full service starts with the product.
We ensure security. As a full-service provider, we offer everything you need to guarantee that your processes run like clockwork.
ConsumablesCustomized full-service offers for maximum production reliability.
Service