AC 1500 P3 Advanced

Prime Wafer Double-sided Polishing Machine

With its patented UPAC-system the AC 1500 P3 Advanced enables throughput optimized batch polishing with up to 18 200mm silicon wafers parallel. Additional installed sensors secures highest process control.

Patented UPAC-system for adaptive control of the polishing gap
Smart sensors enable highest process control

Wafer up to 300 mm / 12", 6 Wafer / Batch

Brand: Peter Wolters

AC 1500 Doppelseiten-Poliermaschine von Lapmaster Wolters

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Characteristics AC 1500 P3 Advanced Polishing Machine

Unique and patented UPAC (Upper Platen Adaptive Control) System
Monitoring of the cooling lubricant flow rate
Loop control

First-Class customer support for the highest machine availability and productivity
High-Pressure Conditioner
Slurry Recycling Station
Slurry Pressure Distribution

Integrated Process Data Recording (DataCare®)
Industry 4.0
Touch Screen

We think ahead because full service starts with the product.

We ensure security. As a full-service provider, we offer everything you need to guarantee that your processes run like clockwork.

Consumables

Customized full-service offers for maximum production reliability.

Service