AC 2000 P3

Prime Wafer Double-sided Polishing Machine

With its patented UPAC-system the AC 2000 P3 enables highest flexibility for polishing silicon prime wafers. Hereby the AC 2000 P3 combines optimized throughout and Cost of Ownership.

Unique and patented UPAC-system
Highest throughput due to doible-sided batch-processing of up to 15 300mm silicon wafers

Bis zu 300 mm / 12 '' Wafer, 15 Wafer / Batch

Brand: Peter Wolters

AC 2000 P3 Prime-Wafer-Doppelseiten-Poliermaschine von Lapmaster Wolters

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Characteristics AC 2000 P3 Polishing Machine

Unique and patented UPAC (Upper Platen Adaptive Control) System
Monitoring of the cooling lubricant flow rate
Loop control

First-Class customer support for the highest machine availability and productivity
Integrated high precision interferometric device for in-situ measurement of the wafer thickness
High-Pressure Conditioner

Slurry Recycling Station
Slurry Pressure Distribution
Integrated Process Data Recording (DataCare®)
Industry 4.0
Touch Screen

We think ahead because full service starts with the product.

We ensure security. As a full-service provider, we offer everything you need to guarantee that your processes run like clockwork.

Consumables

Customized full-service offers for maximum production reliability.

Service