NanoEdge
The NanoEdge as next-gen edge grinding tool for SiC wafers, combines highest throughput with best-in-class grinding results. With its 50% higher throughput compared to similar tools in the market, it's made for highest productivity without any compromises regarding quality. The precise grinding stations realize quality results on micron level, while being fully-automated.
- Fully-automated Dry-In / Dry-Out mechanism for three cassettes
- Three parallel grind modules with integrated dressing
PROCESSING OF SiC WAFERN
4", 6" AND 8"
Characteristics NanoEdge
We think ahead because full service starts with the product.
We ensure security. As a full-service provider, we offer everything you need to guarantee that your processes run like clockwork.
ConsumablesCustomized full-service offers for maximum production reliability.
Service